Growth and characterization of Zn1 xCdxO films using remote plasma MOCVD

Zn1 xCdxO films were successfully grown by remote plasma enhanced metalorganic chemical vapor deposition (RPEMOCVD) with diethyl zinc, dimethyl cadmium, and oxygen plasma. The Cd composition x in the Zn1 xCdxO films was tuned by changing a flow rate of group-II sources. With increasing the Cd composition x, the crystal structure was changed from wurzite (WZ) to rock-salt (RS). The optical band-gap of the Zn1 xCdxO films with the wurzite structure up to x 0.7 varied from 3.3 eV down to 1.9 eV.