Interface study of transition metal (Fe, Zr) on 4H–SiC(0 0 0 1)Si face: photoemission electron microscopy and soft X-ray fluorescence spectroscopy

We have studied interface electronic structure of transition metal film (Fe, Zr)/4H–SiC (substrate) contact systems by using a photoemission electron microscopy (PEEM) and a soft X-ray fluorescence spectroscopy (SXFS). PEEM can show surface micro- and/or nano-structures, whereas SXFS can tell details of chemical bonding states. For specimens of Fe(10 nm)/4H–SiC(0 0 0 1)Si face contact system annealed at 300–900 8C, PEEM images have shown dramatic change in surface morphology above 550 8C, where the Si L2,3 fluorescence spectra can be explained by considering formation of iron silicides. On the other hand, PEEM images and the Si L2,3 fluorescence spectra for specimens of Zr(film)/4H–SiC(0 0 0 1)Si face contact system annealed at 650–1100 8C have indicated that interfaces of specimens are stable up to 1100 8C without any reaction.