Windowless argon excimer source for surface modification

The article describes applications of a novel windowless argon excimer source for surface modification. Experimental results on etching of polymeric surfaces, degradation of organic surface residues, surface activation and modification of gas permeability and selectivity of polymeric membranes are presented. Moreover, radical formation from the excimer source and surface curing of liquid acrylates are examined. Typical treatment times are in the range of minutes for photolytic decomposition effects and seconds for UV curing effects. The surface modification effects induced by the argon excimer source were analysed by XPS, ESR, IR-spectroscopy, white light reflection spectroscopy, scanning electron microscopy, microhardness and permeation measurements.