Title of article
Ultrathin films of Cu on image: Flat bilayers and mesa islands
Author/Authors
J. Brona، نويسنده , , M. R. Wasielewski، نويسنده , , A. Ciszewski، نويسنده ,
Issue Information
روزنامه با شماره پیاپی سال 2012
Pages
6
From page
9623
To page
9628
Abstract
The image adsorption system was investigated by STM, LEED and AES. Cu was deposited at room temperature (RT) and 800 K, with the coverage ranging from a fraction up to 4 bilayers (BL). The first two Cu BL grow in the bilayer-by-bilayer mode. Their structure is pseudomorphic and does not depend on the temperature. For coverage higher than 2 BL, Cu deposited at elevated temperature forms three-dimensional islands in mesa shape with Cu(1 1 1) facets on their tops. The facets and the substrate are epitaxially oriented with image. Obtained results can be helpful in search for an optimal method of Cu deposition onto Ru in the damascene process in microelectronics, and could be also of interest to catalysis.
Keywords
Metallic surfaces , Ruthenium , Scanning tunneling microscopy (STM) , Low-energy electron diffraction (LEED) , Auger electron spectroscopy (AES) , copper
Journal title
Applied Surface Science
Serial Year
2012
Journal title
Applied Surface Science
Record number
1005624
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