Title of article
Quantitative analysis of thin-film conductivity by scanning microwave microscope
Author/Authors
Sohei Okazaki، نويسنده , , Noriaki Okazaki، نويسنده , , Yasushi Hirose، نويسنده , , Yutaka Furubayashi، نويسنده , , Taro Hitosugi، نويسنده , , Toshihiro Shimada، نويسنده , , Tetsuya Hasegawa، نويسنده ,
Issue Information
روزنامه با شماره پیاپی سال 2007
Pages
3
From page
757
To page
759
Abstract
We propose a novel method for high-throughput quantitative analysis of thin-film conductivity σ by using a scanning microwave microscope (SμM). We demonstrated that composition spread thin films of Ti1–xNbxO2 can be utilized as a standard reference in a wide σ range. The shift in Q-value measured by SμM along the composition-spread axis showed a single peak, which moved to the lower x side with film thickness. This behavior was confirmed by electrical field simulation using the finite element method.
Keywords
Scanning microwave microscope , Combinatorial materials science , Quantitative analysis , Conductivity , Thin-film , Finite element method
Journal title
Applied Surface Science
Serial Year
2007
Journal title
Applied Surface Science
Record number
1008582
Link To Document