WOx cluster formation in radio frequency assisted pulsed laser deposition

The influence of oxygen gas pressure and radio-frequency power on the characteristics of the WOx films produced by laser ablation of a W target at room temperature in oxygen reactive atmosphere were investigated. Changing buffer gas pressure in the hundreds of Pa range affects the bond coordination, roughness and morphology of the deposited films, as investigated by micro-Raman spectroscopy, atomic force microscopy and scanning electron microscopy. The combination of radio-frequency discharge and buffer gas pressure on film nanostructure, as reflected by bond coordination, surface morphology and roughness is discussed.