Microfabrication process for patterning metallic lithium encapsulated electrodes

This work presents recent achievements concerning thin film encapsulation of metallic lithium negative electrode. In the context of this study, the encapsulation stack includes polymer and dielectric layers combined in such way to optimize barrier performances of the whole structure towards oxygen and water vapor permeation. The first part of this work is dedicated to the description of the barrier stack architecture and properties. A second part presents the application of a microfabrication process to the metallic lithium negative electrode and barrier stack so as to have very small features (100 μm × 100 μm patterns). The microfabrication process includes several steps of photolithography and etching (dry and wet) blocks, which allows us to reach the target critical dimensions. These results show a method of patterning functional metallic lithium. It demonstrates the feasibility of energy sources miniaturization which is an important issue in the field of autonomous and wireless sensor networks.