Title of article
Electrical conditioning of diamond-like carbon films for the formation of coated field emission cathodes
Author/Authors
M. Semenenko، نويسنده , , G. Okrepka، نويسنده , , O. Yilmazoglu، نويسنده , , H.L. Hartnagel، نويسنده , , D. Pavlidis، نويسنده ,
Issue Information
روزنامه با شماره پیاپی سال 2010
Pages
5
From page
388
To page
392
Abstract
Diamond-like carbon (DLC) films deposited on different substrates by plasma enhanced chemical vapour deposition were investigated. Bonding states and film quality were characterized by FT-IR spectroscopy. The influence of the power of plasma and the deposition time on the sp2/sp3 ratio as well as the concentration of CHn bonds was studied. The influence of sp2/sp3 ratio on the formation process of conducting channels in diamond-like carbon films as a result of electrical breakdown was determined. Reproducible increase of diamond-like carbon film conductivity, with initial sp2/sp3 ratio larger than 0.16, was observed after electrical breakdown.
Keywords
Diamond-like carbon films , Electrical conditioning , Absorption spectra
Journal title
Applied Surface Science
Serial Year
2010
Journal title
Applied Surface Science
Record number
1013324
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