Title of article
Effect of the duty ratio on the indium tin oxide (ITO) film deposited by in-line pulsed DC magnetron sputtering method for resistive touch panel
Author/Authors
Min Hyung Ahn، نويسنده , , Eou Sik Cho، نويسنده , , Sang Jik Kwon، نويسنده ,
Issue Information
روزنامه با شماره پیاپی سال 2011
Pages
7
From page
1242
To page
1248
Abstract
The indium tin oxide (ITO) film was deposited on PET (polyethylene terephthalate) film using in-line pulsed DC magnetron sputtering system with different duty ratios. The reverse time and the frequency of pulsed DC power were changed to obtain the different duty ratios. From the electrical and optical properties such as the sheet resistance, resistivity, thickness and transmittance, the pulsed DC sputtered ITO/PET films were also superior to the DC sputtered ITO/PET films. The reverse time had little effect on the properties of the ITO/PET film and the frequency of pulsed DC power had an immerse effect on the properties of the ITO/PET films. The optimal ITO/PET film was obtained when the frequency was 200 kHz, the reverse time was 1 μs, and the duty ratio was about 80%.
Keywords
Reverse time , Frequency , Pulsed DC sputtering , Indium tin oxide (ITO) , Duty ratio
Journal title
Applied Surface Science
Serial Year
2011
Journal title
Applied Surface Science
Record number
1015341
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