Field discontinuity refinement criteria and optimal discretizations in adaptive finite-element electromagnetic analysis for microelectronic system interconnections

The effectiveness of field-discontinuity refinement criteria for achieving optimal finite element discretizations is investigated. The criteria are first examined directly with finite-element solutions computed from optimally discretized systems. Subsequently, the optimality of the criteria are evaluated for practical adaptive finite-element electromagnetic analysis of principal device features in modern microelectronic system interconnection structures.