Optimization design of microchannel heat sink geometry for high power laser mirror

Microchannel heat sink for high power laser mirror with water cooling was analyzed as a function of microchannel geometry and operation parameters. A comparative analysis of the thermal deformation on the mirror surface without cooling and that with cooling revealed that the maximal thermal deformation on the mirror surface could decrease from about 0.115 μm to around 0.040 μm under the laser power of 200 W/cm2 by using microchannel heat sink designed. In order to enhance the performance of microchannel heat sink, the effects of channel width, channel depth, fin width, mirror thickness and cooling region were investigated. The results indicated that the heat transfer performance of the microchannel heat sink could be further improved by narrow and deep channel, narrow fin, thin mirror and large cooling region.