Fabrication of a multi-layered carbon nanotube/SiC stack structure

A multi-layered carbon nanotube (CNT)/SiC stack structure was fabricated by repeated alternate deposition and surface decomposition of SiC. The newly deposited 3C-SiC layer on the CNT film had good crystallinity; the CNTs produced by the decomposition of the 3C-SiC were as mostly aligned as the CNTs produced from pristine 6H-SiC. By appropriate choice of deposition and decomposition conditions we demonstrated that it is possible to produce alternating CNT and SiC layers with a controlled thickness.