Effect of swift heavy ions on the photoluminescence properties of Si/SiO2 multilayers

Si/SiO2 multilayers were prepared by reactive magnetron sputtering of a pure silica target and irradiated at View the MathML source at GANIL with Kr and Pb ions whose energies were View the MathML sourceView the MathML source and View the MathML source per nucleon View the MathML source, respectively. After a postannealing treatment, the films exhibit luminescence in the visible spectral range at room temperature. A blueshift of the photoluminescence with the increasing Se is noticed and is ascribed to a decrease in the Si grain size and/or to a decrease in the interface width.