Structure of InAs/GaAs quantum dots grown with Sb surfactant

InAs quantum dots in GaAs, grown under the presence of Sb by metalorganic chemical vapor deposition, were studied with cross-sectional scanning tunneling microscopy. Large flat quantum dots with a truncated pyramidal shape, base lengths between 15 and 30 nm, heights of 1–3 nm, and a rather pure InAs stoichiometry were found for the case of an Sb supply during the InAs deposition. If Sb is already supplied during GaAs stabilization prior to InAs deposition, the dots become even larger and tend to get intermixed with Ga, but remain coherently strained with a reversed cone-like In distribution. Regarding the quantum dot growth Sb acts as surfactant, whereas an incorporation of individual Sb atoms was observed in the wetting layer.