Material removal model for AFM-based nanochannel fabrication

This paper presents a sphere-like machining model in small-sized nanochannel fabrication and a cone-like machining model in large-sized nanochannel fabrication. The material removal rate is proportional to the normal force to the power of 3/2 in the sphere-like machining model. The material removal rate is proportional to the normal force in the cone-like machining model. The material removal coefficient decreases as the machining times increase under the same normal force. The material removal rate can be computed at a given normal force and machining times. Certainly, these models can also be used in the macro wear study.