• Title of article

    Experimental comparison of N(1s) X-ray photoelectron spectroscopy binding energies of hard and elastic amorphous carbon nitride films with reference organic compounds Original Research Article

  • Author/Authors

    In this work، نويسنده , , hard and elastic amorphous carbon nitride (a-CNx) films were deposited by DC magnetron sputtering on heated Si(001) substrates at 400 °C. Nanoindentation results confirmed that the films were highly compliant and had high elastic recovery. X، نويسنده ,

  • Issue Information
    روزنامه با شماره پیاپی سال 2003
  • Pages
    7
  • From page
    1917
  • To page
    1923
  • Keywords
    D. chemical structure , mechanical properties , A. Carbon films , C. x-ray photoelectron spectroscopy , B. plasma sputtering
  • Journal title
    Carbon
  • Serial Year
    2003
  • Journal title
    Carbon
  • Record number

    1119230

    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=10&DC=1119230