Influence of the deposition parameters on the texture of pyrolytic carbon layers deposited on planar substrates Original Research Article

Pyrolytic carbon layers were deposited from methane on planar substrates (pyrolytic boron nitride) at various residence times, methane pressures and deposition temperatures. The depositions were performed in a cavity oriented perpendicular to the gas flow. The small surface area/reactor volume ratio of the reactor geometry allows depositions in the growth and nucleation mechanism. Transmission electron microscopy was applied to study the texture and microstructure of the carbon layers. A texture transition from medium- to high-textured pyrolytic carbon occurs as a result of increasing residence times, methane pressures and temperatures. Improved textures are generally correlated with increasing deposition rates, which are not necessarily constant during long-term depositions. Lower textures are observed in the vicinity of the substrate interface that are attributed to the influence of the substrate morphology and microstructure.