Lithographically defined site-selective growth of Fe filled multi-walled carbon nanotubes using a modified photoresist

Partially Fe filled multi-walled carbon nanotubes (MWCNTs) were grown by chemical vapor deposition with propane at 850 °C using a simple mixture of iron (III) acetylacetonate (Fe(acac)3) powder and conventional photoresist. Scanning electron microscopy revealed that catalytic nanoparticles with an average diameter of 70 nm are formed on the Si substrate which governs the diameter of the MWCNTs. Transmission electron microscopy shows that the nanotubes have a multi-walled structure with partial Fe filling. A site-selective growth of partially Fe filled MWCNTs is achieved by a simple photolithographic route.