Title of article
The structural phases of non-crystalline carbon prepared by physical vapour deposition Original Research Article
Author/Authors
D.W.M. Lau، نويسنده , , A. Moafi، نويسنده , , M.B. Taylor، نويسنده , , J.G. Partridge، نويسنده , , D.G. McCulloch، نويسنده , , R.C. Powles، نويسنده , , D.R. McKenzie، نويسنده ,
Issue Information
روزنامه با شماره پیاپی سال 2009
Pages
8
From page
3263
To page
3270
Abstract
The structure of non-crystalline carbon films produced using physical vapour deposition is studied as a function of ion impact energy and substrate temperature. The average ion energy was varied from 10 eV to 820 eV using magnetron sputtering and cathodic
Journal title
Carbon
Serial Year
2009
Journal title
Carbon
Record number
1126368
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