Title of article
Particle-in-Cell/Monte Carlo simulation of CF4 discharge in capacitively coupled plasma reactor Original Research Article
Author/Authors
Jonghyuk Kang، نويسنده , , Ganyoung Park، نويسنده , , Jaekoo Lee، نويسنده ,
Issue Information
دوهفته نامه با شماره پیاپی سال 2007
Pages
2
From page
129
To page
130
Journal title
Computer Physics Communications
Serial Year
2007
Journal title
Computer Physics Communications
Record number
1137253
Link To Document