Ga-rich precipitates in Fe ion implanted GaAs Original Research Article

Gallium-rich precipitates (named as γ′-Ga(Fe)) were observed in Fe ion implanted and annealed GaAs. Transmission electron microscopy (TEM) analysis shows that these precipitates have an orthorhombic structure (γ-Ga-type) with lattice parameters of a=1.04 nm, b=1.298 nm and c=0.511 nm. Most of these precipitates grow in GaAs as threefold-twinned hexagonal cylindrical particles with their hexagonal cylindrical axes running along the [110]γ′-Ga(Fe) direction. The γ′-Ga(Fe) phase is stable either under the electron beam irradiation or at room temperature.