SECAM: a supervisory equipment control application model for integrated semiconductor manufacturing equipment

This paper describes SECAM (Supervisory Equipment Control Application Model), an objectoriented application prototype for SECs (supervisory equipment controller) for integrated semiconductor manufacturing equipment based on a high-level fieldbus PROFIBUS-FMS. It also features a layered architecture based on some key objects including service objects (SOs), command objects, and virtual control device (VCD) objects, which facilitate complex supervisory control application design and implementation based on highlevel fieldbus services. The proposed approach is demonstrated for a CTC for semiconductor manufacturing.