Microsensors and actuators for macrofluidic control

Microsensors and actuators suitable for macrofluidic control have been designed, fabricated, tested, and optimized over the span of the last decade. MEMSbased shear stress sensor arrays using polysilicon hot filaments have been fabricated on both rigid (silicon) and flexible (parylene) substrate for application on all types of fluid dynamic and aerodynamic surfaces. In addition, MEMS bubble flap-type pneumatic actuators have been tested and used in turbulent boundary layer drag reduction in conjunction with the rigid MEMS shear stress sensor arrays acting as high-speed shear stress imagers. The flexible MEMS bubble actuator arrays have also been used with the flexible shear stress sensor arrays for generating maneuvering forces in the wind tunnel for a delta wing model and on UAVtype radio-controlled aircraft.