Nonlinear analysis for a novel actuator

In this paper, an electromechanical coupled nonlinear dynamic equation of the novel actuator (electromechanical integrated electrostatic harmonic actuator) is presented. Using the equation, free vibrations and forced vibrations for the actuator are investigated, respectively. The changes of the nonlinear free vibrating displacements and the frequencies with respect to the system parameters are presented. Nonlinear vibrating frequencies and magnitudes of the actuator are affected by mechanical and electric parameters. These results are useful in design and manufacture of the actuator.