Relationship among input-force, payload, stiffness and displacement of a 3-DOF perpendicular parallel micro-manipulator

In this paper, a three translational degrees of freedom (DOF) complaint perpendicular parallel micro-manipulator (PPMM) with monolithic structure is presented. The PPMM is driven by three piezoelectric actuators, and its three actuating directions are normal to each other. To achieve highly accurate control, a new approach investigating the relationship among input-force, payload, stiffness, and displacement (IPSD) of the 3-DOF PPMM is proposed in analytical style. And the relationship between voltage value of piezoelectric actuator and output displacement of end-effector is obtained base on the IPSD model. Finally, in order to verify IPSD model, the simulations by finite element method (FEM) and experiments are performed. The proposed IPSD model is useful for both digital control and design of the 3-DOF PPMM.