Title of article
Effect of the deposition parameters on the properties of the two-layer surface coatings obtained using magnetron sputtering
Author/Authors
L.A. Dobrzanski، نويسنده , , W Kwa?ny، نويسنده , , R Shishkov، نويسنده , , J Madejski، نويسنده ,
Issue Information
روزنامه با شماره پیاپی سال 2001
Pages
9
From page
493
To page
501
Abstract
This paper presents the effect of the deposition parameters on the properties of the Ti+TiN, Ti+Ti(CxNx−1), and Ti+TiC two-layer surface coatings obtained using magnetron sputtering in a vacuum furnace with a controlled temperature on a sintered ASP 30 high-speed matrix. Results of the investigated coatings’ tests are presented, depending on the working atmosphere, distance from the magnetron shield, and vacuum furnace temperature. Their effect on the structural and mechanical properties of the coatings has been evaluated.
Keywords
PVD coatings , Adhesion , Texture coefficient , Diffusion
Journal title
Journal of Materials Processing Technology
Serial Year
2001
Journal title
Journal of Materials Processing Technology
Record number
1176090
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