Title of article
Applications of shear horizontal surface acoustic waves to thin film evaluation
Author/Authors
M. Baszun، نويسنده , , D. Grze?da، نويسنده ,
Issue Information
روزنامه با شماره پیاپی سال 2003
Pages
5
From page
34
To page
38
Abstract
Shear horizontal acoustic wave devices could be used as sensing elements for the measurement of material film properties. This work concerns gravimetric and viscosity sensors for which computer simulation results are given.
Keywords
Surface acoustic wave , Viscosity sensors , SSBW
Journal title
Journal of Materials Processing Technology
Serial Year
2003
Journal title
Journal of Materials Processing Technology
Record number
1177308
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