Fractal nature of surface topography and physical properties of the coatings obtained using magnetron sputtering

The paper presents the investigation results of the effect of deposition parameters on structure and mechanical properties of the Ti + Ti(C, N) coatings obtained by magnetron sputtering in the vacuum furnace onto the ASP 30 sintered high speed steel. Effect of sputtering parameters on chemical and phase composition, thickness, micro-hardness, and roughness parameter has been evaluated. The characteristic structure and surface topography of the analyzed coatings are presented, the fractal nature of the surface topography was confirmed.