Microfabrication of single chamber SOFC with co-planar electrodes via multi-step photoresist molding with thermosetting polymer

In this paper, we report a simple and novel microfabrication method, named photoresist molding with thermosetting polymer (PRM-TP) which is very efficient for fabricating multiple ceramic structures with sub-micron to several millimeter scaled dimension. PRM-TP is a novel hybrid process combining lithographic tools and customized ceramic slurry process which can utilize the advantages of micro-scale ceramic fabrication with well controlled microstructure. In order to demonstrate general usefulness of PRM-TP, we applied this process for the construction of single chamber solid oxide fuel cell (SC-SOFC) with co-planar electrodes. According to the cell test at 500 °C under single chamber operation condition with pre-mixed gas of methane and air, the open circuit voltage and power output of SC-SOFC reached 205 mV and 67 mW/cm2, respectively.