Thermal analysis and vapour pressure of a new series of tungsten(VI) oxo-alkoxide-β-ketoesterate complex precursors for the chemical vapour deposition of tungsten oxide

A new series of tungsten complexes, tungsten(VI) oxo-alkoxide-β-ketoesterate complexes have been synthesized and characterized by infrared and NMR spectroscopy. Thermogravimetric analysis has been carried out on the complexes as a function of temperature, and isothermally as a function of time. Based on the thermal analysis data, these complexes are evaluated for their suitability as precursors for the chemical vapour deposition of tungsten oxide thin films. The vapour pressure of these precursors is estimated using the Langmuir equation.