Optimization of fully coupled electrostatic–fluid–structure interaction problems

A formal methodology is presented for high fidelity analysis and design optimization of structures undergoing electrostatic–fluid–structure interaction. The optimization problem is solved by gradient-based algorithms. A five-field formulation of the fully coupled electrostatic–fluid–structure system is presented. Based on this formulation, the coupled global sensitivity equations are derived. The analysis and sensitivity analysis are both solved by staggered procedures. The presented methodology is applied to two problems involving the electrostatic actuation of fluidic devices. The accuracy of the analytical sensitivity analysis is verified by finite difference computations. The example problems illustrate the importance of accounting for the interaction of all three physical systems.