Electrostatic generation and theoretical modelling of ultra fine spray of ceramic suspensions for thin film preparation

An electrostatic atomization technique has been developed to generate ultra-fine spray of ZrO2 and SiC ceramic suspensions with a droplet size of about 4 μm and a narrow size distribution for preparing thin films. It is well known that electrostatic atomization in cone-jet mode is the most suitable technique to generate the desired aerosol. Experimental and modelling results showed that droplet size and spray current obey theoretical prediction of scaling law and that droplet transport process is in agreement with experimental observation. ZrO2 and SiC thin films prepared this way were found to be homogenous.