Title of article
Fabrication and plasma resistance properties of transparent YAG ceramics
Author/Authors
Xianpeng Qin، نويسنده , , Guohong Zhou، نويسنده , , Hao Yang، نويسنده , , Jen-Hsien Wong، نويسنده , , Jian Zhang، نويسنده , , Dewei Luo، نويسنده , , Shiwei Wang، نويسنده , , Jan Ma، نويسنده , , Dingyuan Tang، نويسنده ,
Issue Information
روزنامه با شماره پیاپی سال 2012
Pages
7
From page
2529
To page
2535
Abstract
High quality transparent yttrium aluminum garnet (YAG) ceramics with an average grain size of about 12 μm have been fabricated by a solid state reactive sintering method. Plasma resistance property of the fabricated YAG ceramics was studied and compared with that of the Y2O3 ceramics, silicate glass and quartz. The YAG ceramics showed an excellent plasma resistance as well as Y2O3 ceramics. After etching in F-plasma for 6 h, the eroded depth of YAG ceramics was about 100 nm. The plasma resistance of YAG ceramics was far better than that of silicate glass and quartz.
Keywords
C. Optical properties , microstructure , transparent ceramics , YAG , Plasma resistance
Journal title
Ceramics International
Serial Year
2012
Journal title
Ceramics International
Record number
1274209
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