Corrosion behavior in simulated environments of ITZO films prepared by two targets co-sputtering

Indium tin zirconium oxide (ITZO) films were deposited by a co-sputtering technique with ITO and zirconium targets. The stability and corrosion behavior of films in simulated environments were studied on account of microstructure and optical–electrical properties. The results show that ITZO films possess a better crystalline structure and optical–electrical properties. Zirconium-doping changes the preferred orientation of ITO films, and ITZO films under the optimum parameters have sheet resistance of 10 Ω/sq and transmittance of above 85%. According to the polarization measurements and the relative resistance change of the films in simulated environments such as acidic climate, oceanic climate and industrial climate, the doping films show better chemical and thermal stabilities than ITO films. Besides the influence of crystal structure, the better stability of zirconium oxide can improve the chemical and thermal stabilities. ITZO films have better electrical stability and chemical antcaustic properties, and the films could find more extensive applications.