The effect of sulfur on CVD performance of Pd(II) β-diketonate precursors and the completion of a structural trans-influence series: synthesis and structural characterization of Pd(S,S-tmhd)2

The three complexes, Pd(tmhd)2 (1), Pd(S-tmhd)2 (2), and Pd(S,S-tmhd)2 (3) (where tmhd, S-tmhd, and S,S-tmhd are the anions of 2,2,6,6-tetramethyl-3,5-heptanedione, 2,2,6,6-tetramethyl-5-thioxo-3-heptanone, and 2,2,6,6-tetramethyl-3,5-heptanedithione, respectively) were prepared and characterized by thermogravimetric analysis in order to assess their relative volatilities as a function of sulfur substitution. Complexes 1 and 2 volatilized with little residue, while 3 experienced significant decomposition during volatilization. The solid-state structure of 3 was determined in order to complete a structural trans-influence series with 1 and 2 and to assess possible reasons for its lower thermal stability. A large trans-influence was observed for the bond lengths in the coordination sphere across the series of complexes 1, 2, and 3. The longer Pd–S bond distances found in 3 may be a contributing factor to its unsuitability as a CVD precursor.