Title of article
Accordion structured porous silicon membranes: Application to contamination detection of organic volatile by FTIR spectroscopy
Author/Authors
S. Cavalaglio، نويسنده , , L. Robert، نويسنده , , B. Gauthier-Manuel، نويسنده ,
Issue Information
روزنامه با شماره پیاپی سال 2011
Pages
4
From page
250
To page
253
Abstract
We report here the design of a new three-dimensional structured porous silicon membrane having an accordion shape by anodizing of anisotropic KOH etched silicon wafer. A complete process is described and an application example as contamination detection of organic volatile by FTIR spectroscopy is proposed.
Keywords
membrane , Structured porous silicon , FTIR matrix
Journal title
Journal of Membrane Science
Serial Year
2011
Journal title
Journal of Membrane Science
Record number
1357037
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