Angular resolved energy distributions of low energy light ions reflected from a polycrystalline Mo surface

We have developed an experimental system to study systematically the interaction of low energy beams with materials. The angular distributions and energy spectra of positive and negative ions reflected from a polycrystalline Mo surface bombarded by a beam of low energy (1–3 keV) ions and neutrals of H, H2, H3, He, and O have been measured with this system. The experimental results show that the charge state of outgoing particles yields a pronounced difference in the reflection coefficient and some weaker effect upon the energy distribution. The reflected beams usually showed maximum intensities at around the angle of mirror reflection of the incident beams. A carbon coated Mo sample prepared in a separate plasma chamber was also tested.