Efficient prediction of the quality factors of micromechanical resonators

A high quality factor (Q-factor) is one of the major requirements of high-performance resonators. An understanding of the dissipation mechanism is crucial for maximizing the quality factor by reducing the energy loss. Thermoelastic damping has been well-known as the important intrinsic dissipation that affects the quality factor of micro-resonators. In this study, a finite element formulation based on the weak form of fully coupled thermoelastic problems is suggested. The coupled thermoelastic equation usually leads to a large-size complex eigenvalue problem, which is very massive and time-consuming to solve. Therefore, we also applied the model order reduction (MOR) scheme to this coupled multiphysical problem in order to achieve computational efficiency. The present approach is validated by comparing the numerical results and analytical solutions.