Processing of highly oriented LiNbO3 thin films through ametal-organic precursor solution

A novel processing method for highly oriented pattered LiNbO3 films is developed using a chemically modified precursor molecule with UV sensitive chemical bonds. Patterned LiNbO3 films can be also synthesized via water-based precursor solution by applying a photolithographic technique. Patterned LiNbO3 films crystallized on sapphire substrates with a highly preferred orientation along the c axis, by heat treatment at temperatures around 500 °C. LiNbO3 films prepared from aqueous precursor solutions were characterized in terms of the hydroxyl content of their surface layers, determined from their crystallization and optical properties.