Self assemble silicide architectures by directional solidification

Directional solidification of eutectics has self assembly characteristics that can fabricate two dimensional periodic arrays of two or more phases. The ordering of the phases can be utilized as a “lithographic technique” to produce porous structures for fabrication of miniature devices. Directional solidification by the Bridgman technique was applied to the eutectic systems Si–TiSi2 and Si–YSi2. Patterned growth of TiSi2 rods occur in the silicon matrix during solidification. Micro-channel structure of pillar arrays of TiSi2 was produced by silicon dissolution by KOH. Average TiSi2 rod diameter was 2.5 μm with 99% of the population falling in the 2–3 μm range. Colony formation could not be suppressed in the Si–TiSi2 system. Patterned growth is not observed in Si–YSi2 system. Eutectic and hyper-eutectic Si–YSi2 compositions formed anomalous eutectic microstructure. Microstructure shows dependence upon the solidification rate.