Miniature accordion-shaped low voltage piezo actuators for high displacements

New 3D piezoelectric actuators have been developed to gain higher displacements or specific bending effects. Accordion-shaped structures, so called S-morphs, have the potential to be used as miniaturized optical shutters for optical telecommunications. To exhibit the desired displacement of >300 μm, specific multilayer structures and electrode designs must be developed. To lower the voltage of the power supply, multlayer structures based on thin tapes must be used. By the deliberate preparation of alternating laminated and non-laminated areas of the stacked tapes in combination with a specific electrode design for benders, new types of actuator displacement can be achieved. The paper will describe two processing routes to manufacture accordion-shaped multilayer structures. The performance will be demonstrated.