Optimization of processing parameters for preparation of LaNiO3 thin films from the citrate precursors

Lanthanum nickel oxide (LaNiO3) is an electrically conductive ceramics, which has a potential use as electrode for ferroelectric thin films, multilayer actuators and many other electronic devices. In this work, LaNiO3 thin films were prepared by a modified Pechini process, based on polymeric citrate precursors. DTA analysis of the precursor solution showed that formation and crystallization of LaNiO3 were completed up to 790 °C. Films were deposited using spin-on technique and thermally treated in temperature range 600–800 °C, with heating rate of 1°/min. Processing parameters, such as concentration and annealing temperature, as well as number of deposited layers were optimized to achieve desired film quality. The structure of LaNiO3 was confirmed by X-ray diffraction analysis, whereas microstructural parameters, such as grain size and roughness, were analyzed by AFM.