Carbon burnout and densification of self-constrained LTCC for fabrication of embedded structures in a multi-layer platform

Carbon burnout and densification of self-constrained low temperature co-fired ceramic (LTCC) are investigated using thermal analysis techniques. Slow heating rates and holding at a temperature higher than initial crystallization temperature of the glass component show evidence of retarding the densification of the self-constrained LTCC. Based on these results, it is proposed that the fabrication of embedded structures in a multi-layer self-constrained LTCC platform could be achieved by controlling carbon burnout with a multi-step co-firing profile, which can ensure complete carbon burnout without affecting the densification of LTCC structures. Using this approach, fabrication of an embedded cavity with dimensions of 10 mm × 10 mm × 0.50 mm in a self-constrained LTCC platform is demonstrated.