Title of article
Gas detection with a porous silicon based sensor
Author/Authors
Baratto، نويسنده , , C and Comini، نويسنده , , E and Faglia، نويسنده , , G and Sberveglieri، نويسنده , , Girolamo Di Francia، نويسنده , , G and De Filippo، نويسنده , , Eliana La Ferrara، نويسنده , , V and Quercia، نويسنده , , L and Lancellotti، نويسنده , , L، نويسنده ,
Issue Information
روزنامه با شماره پیاپی سال 2000
Pages
3
From page
257
To page
259
Abstract
Porous silicon (PS) layers with 60% porosity and 80 μm thick were prepared from n-type silicon wafer. We present the sensitivity of PS photoluminescence to 250 ppm of carbon monoxide. Besides the variation of conductivity of the device due to presence of organic vapors such as chloroform, methanol, ethanol and toluene have been carried out.
Keywords
Gas sensors , Porous silicon , Organic vapors
Journal title
Sensors and Actuators B: Chemical
Serial Year
2000
Journal title
Sensors and Actuators B: Chemical
Record number
1410901
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