Overview on fabrication of three-dimensional structures in multi-layer ceramic substrate

Three-dimensional structures in a multi-layer ceramic substrate are important in realizing ceramic-based meso- and micro-systems. During lamination and/or co-firing, three-dimensional structures, especially those with suspended structures, tend to deform and sag due to the intrinsic nature of the green (un-fired) ceramic material. Fabrication of three-dimensional structures with well-controlled dimensional stability and mechanical integrity remains a challenge. This paper discusses the challenges in fabricating structures in a multi-layer ceramic substrate. An overview is provided of the current state of the art in patterning and lamination techniques for the fabrication of these three-dimensional structures.