Title of article
Gold and platinum as ozone sensitive layer in work-function gas sensors
Author/Authors
Zimmer، نويسنده , , M. and Burgmair، نويسنده , , M. and Scharnagl، نويسنده , , K. and Karthigeyan، نويسنده , , A. and Doll، نويسنده , , T. C. Eisele، نويسنده , , I.، نويسنده ,
Issue Information
روزنامه با شماره پیاپی سال 2001
Pages
5
From page
174
To page
178
Abstract
Hybrid suspended gate FET (HSGFET) devices with a sensitive layer of platinum or gold were proven to be well-suited as reproducible ozone detection from the low ppb region up to 500 ppb and higher. Operating at 130°C, gold shows a nearly linear dependence on ozone concentration with high signals and a small humidity influence. Platinum at 130°C convinces with a fast response time and low cross sensitivities to other gases.
Keywords
Work-function , Sensitive layer , Gold , Platinum , Ozone detection , Gas sensor
Journal title
Sensors and Actuators B: Chemical
Serial Year
2001
Journal title
Sensors and Actuators B: Chemical
Record number
1412825
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