Title of article
Thermal annealing effect on nanostructured TiO2 microsensors by supersonic cluster beam deposition
Author/Authors
E. Barborini، نويسنده , , E. and Bongiorno، نويسنده , , G. and Forleo، نويسنده , , A. and Francioso، نويسنده , , Jorge L. Sônego Milani، نويسنده , , P. and Kholmanov، نويسنده , , I.N. and Piseri، نويسنده , , P. and Siciliano، نويسنده , , P. and Taurino، نويسنده , , A.M. and Vinati، نويسنده , , S.، نويسنده ,
Issue Information
روزنامه با شماره پیاپی سال 2005
Pages
6
From page
22
To page
27
Abstract
Supersonic cluster beam deposition (SCBD) is used for fabrication of microsensors based on nanostructured titania layers. With a simple one-step post-deposition thermal treatment it is possible to modify the structural and electrical properties of the sensitive layers. Morphological, structural, and electrical characterisations are shown. The obtained sensors have very good performances in term of dynamic response to the exposure to methanol.
Keywords
Microfabrication , nanostructured materials
Journal title
Sensors and Actuators B: Chemical
Serial Year
2005
Journal title
Sensors and Actuators B: Chemical
Record number
1420780
Link To Document