Title of article
CIP (cleaning-in-place) suitable “non-glass” pH sensor based on a Ta2O5-gate EIS structure
Author/Authors
Schِning، نويسنده , , M.J. and Brinkmann، نويسنده , , D. and Rolka، نويسنده , , D. and Demuth، نويسنده , , C. and Poghossian، نويسنده , , A.، نويسنده ,
Issue Information
روزنامه با شماره پیاپی سال 2005
Pages
7
From page
423
To page
429
Abstract
“Non-glass” pH-sensitive capacitive EIS (electrolyte–insulator–semiconductor) sensors consisting of a Ta2O5-gate have been investigated in terms of their CIP (cleaning-in-place) suitability. After optimisation of the process parameters, even after 30 CIP cycles, the sensors show a clear pH response and nearly linear calibration curve. The video-microscopic and scanning electron microscopy investigations do not show any visible degradation or destruction of the Ta2O5 films.
Keywords
“Non-glass” capacitive pH sensor , CIP (cleaning-in-place) suitability , Ta2O5
Journal title
Sensors and Actuators B: Chemical
Serial Year
2005
Journal title
Sensors and Actuators B: Chemical
Record number
1420867
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