• Title of article

    CIP (cleaning-in-place) suitable “non-glass” pH sensor based on a Ta2O5-gate EIS structure

  • Author/Authors

    Schِning، نويسنده , , M.J. and Brinkmann، نويسنده , , D. and Rolka، نويسنده , , D. and Demuth، نويسنده , , C. and Poghossian، نويسنده , , A.، نويسنده ,

  • Issue Information
    روزنامه با شماره پیاپی سال 2005
  • Pages
    7
  • From page
    423
  • To page
    429
  • Abstract
    “Non-glass” pH-sensitive capacitive EIS (electrolyte–insulator–semiconductor) sensors consisting of a Ta2O5-gate have been investigated in terms of their CIP (cleaning-in-place) suitability. After optimisation of the process parameters, even after 30 CIP cycles, the sensors show a clear pH response and nearly linear calibration curve. The video-microscopic and scanning electron microscopy investigations do not show any visible degradation or destruction of the Ta2O5 films.
  • Keywords
    “Non-glass” capacitive pH sensor , CIP (cleaning-in-place) suitability , Ta2O5
  • Journal title
    Sensors and Actuators B: Chemical
  • Serial Year
    2005
  • Journal title
    Sensors and Actuators B: Chemical
  • Record number

    1420867