Title of article
Validation of a single fibre-fed heterodyne laser interferometer with nanometre uncertainty
Author/Authors
Knarren، نويسنده , , B.A.W.H. and Cosijns، نويسنده , , S.J.A.G. and Haitjema، نويسنده , , H. and Schellekens، نويسنده , , P.H.J.، نويسنده ,
Issue Information
فصلنامه با شماره پیاپی سال 2005
Pages
8
From page
229
To page
236
Abstract
In this paper the validation of a fiber-fed heterodyne laser interferometer with nanometre uncertainty is presented. The achievable displacement measurement uncertainty is investigated for different polarisation maintaining fibres used in these interferometers. Measurement results are shown for both a range of 1 μ m as well as a range of 300 mm. It is shown that a (selected) PM-fibre with an extinction ratio of 1:1650 and the use of an external reference allows realising a fibre-fed laser interferometer able to measure displacements with the same uncertainty as a laser interferometer system without fibre. Tests were performed with fibres ranging in length up to 50 m.
Keywords
Laser interferometry , Heterodyne laser interferometry , Dimensional metrology , optical fibres , Nanometre uncertainty
Journal title
Precision Engineering
Serial Year
2005
Journal title
Precision Engineering
Record number
1429031
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