Title of article
Application of catʹs-eye retroreflector in micro-displacement measurement
Author/Authors
Ren، نويسنده , , Dongmei and Lawton، نويسنده , , Kevin M. and Miller، نويسنده , , Jimmie A.، نويسنده ,
Issue Information
فصلنامه با شماره پیاپی سال 2007
Pages
4
From page
68
To page
71
Abstract
The performance of a catʹs-eye retroreflector in interferometric micro-displacement measurements is discussed. Based on paraxial calculations, approximate equations of the wavefront distortion and the measurement error caused by the displacement itself are derived. The capability for nanometer scale error compensation is suggested.
Keywords
Interferometer , Catיs-eye retroreflector , Micro-displacement measurement
Journal title
Precision Engineering
Serial Year
2007
Journal title
Precision Engineering
Record number
1429202
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